A highly ordered and damage-free Ge inverted pyramid array structure for broadband antireflection in the mid-infrared
نویسندگان
چکیده
A highly ordered and damage-free microscale Ge inverted pyramid array is fabricated by HF-free metal-assisted chemical etching. The exhibits significant broadband antireflection properties in the mid-infrared region.
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ژورنال
عنوان ژورنال: Journal of Materials Chemistry C
سال: 2021
ISSN: ['2050-7526', '2050-7534']
DOI: https://doi.org/10.1039/d1tc01134k